Deformable Micromirror Devices As Phase Modulating High Resolution Light Valves

Author

Kuck, H. ; Doleschal, W. ; Gehner, A. ; Geundke, W. ; Melcher, R. ; Paufler, J. ; Seltmann, R. ; Zimmer, G.

Author_Institution

Fraunhofer Institute of Microelectronic Circuits and Systems

Volume

fYear

1995

fDate

25-29 Jun 1995

Firstpage

301

Lastpage

304

Keywords

Aluminum; Elasticity; Electrodes; Gratings; Micromirrors; Mirrors; Phase modulation; Valves; Viscosity; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

DOI

10.1109/SENSOR.1995.717178

Filename

717178

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