Microdischarge arrays: a new family of UV sources

Author

Park, S.-J. ; Eden, J.G.

Author_Institution

Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA

fYear

2001

fDate

July 30 2001-Aug. 1 2001

Abstract

We report recent progress in the fabrication of micro hollow cathode discharge arrays that can be utilized as a miniature UV generation source having the size of tens - hundreds of microns. Microdischarges exhibit several novel characteristics, for example, high power loading (tens - hundreds of kW/cc) and high operational pressure. And especially, we can easily obtain any wavelength ranges of radiation from the device just by changing discharge gases. Furthermore, since various types of device structures and device materials have been developed, a number of lighting applications are available.

Keywords

arrays; glow discharges; light sources; micromechanical devices; device materials; device structures; discharge gases; high operational pressure; high power loading; lighting applications; micro hollow cathode discharge array fabrication; microdischarge array UV sources; miniature UV generation source; Anodes; Atmosphere; Cathodes; Dielectric devices; Fault location; Laboratories; Optical arrays; Plasma stability; Polymer films; Ultraviolet sources;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Lasers and Applications/Ultraviolet and Blue Lasers and Their Applications/Ultralong Haul DWDM Transmission and Networking/WDM Components, 2001. Digest of the LEOS Summer Topica

Conference_Location

Copper Mountain, CO, USA

Print_ISBN

0-7803-7100-3

Type

conf

DOI

10.1109/LEOSST.2001.941923

Filename

941923