3-DOF MEMS Gyroscope modeling and design

Author

Xuguo Huang ; Ping Sun ; Zhi Wang

Author_Institution

Chengdu Goldtel Electron. Technol. Co., Ltd., Chengdu, China

Volume

2

fYear

2011

fDate

12-14 Aug. 2011

Firstpage

849

Lastpage

852

Abstract

In this paper, issues related to the modeling and designs on a 3-DOF (degree-of-freedom) MEMS Gyroscope are studied. The MEMS Gyroscope employs a combination of two proof-masses and flexures to form 1-DOF resonator in the drive direction and 2-DOF oscillator in the sense direction. The 3-DOF MEMS Gyroscope has very stable responses within flat region for both gain and phase corresponding to variations in spring coefficient or quality factor. Through simulation and analyses, the gyroscope is optimized. The high operational frequency device (5.053 kHz) and bandwidth over 1 kHz is designed. In the full scale range ±5007s, the high scale factor about 0.527 mv/ (°/s) is achieved.

Keywords

Q-factor; gyroscopes; micromachining; microsensors; oscillators; 1-DOF resonator; 3-DOF MEMS gyroscope modeling; drive direction; frequency 5.053 kHz; high operational frequency device; micromachined gyroscope; proof-masses; quality factor; spring coefficient; Frequency response; Gyroscopes; Micromechanical devices; Oscillators; Resonant frequency; Springs; Suspensions; MEMS gyroscope; Modeling and design; stable responses;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic and Mechanical Engineering and Information Technology (EMEIT), 2011 International Conference on

Conference_Location

Harbin, Heilongjiang, China

Print_ISBN

978-1-61284-087-1

Type

conf

DOI

10.1109/EMEIT.2011.6023227

Filename

6023227