Electrostatic linear microactuators based on the inchworm actuation

A novel structure of a linear microactuator of which moving principle stems from the motion of the inchworm has been designed and characterized. The proposed structure can overcome serious problems from which conventional linear microactuators suffer, primarily due to the moving principle that is the repetition of attachment and detachment of the moving part to the fixed part. According to the calculated results, the proposed microactuator can generate force of a few mN and the moving speed of 13 cm/min under the condition of 100 volts and the frequency of 1.4 kHz