• DocumentCode
    3362688
  • Title

    Intuitive and inexpensive method to evaluate flip chip bonding parameters of micro bump with wafer-level underfill material using glass substrate

  • Author

    Jie Li Aw ; Ser Choong Chong ; Cereno, Daniel Ismael ; KengHwa Teo ; Rao, V. Srinivasa

  • Author_Institution
    Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
  • fYear
    2013
  • fDate
    11-13 Dec. 2013
  • Firstpage
    219
  • Lastpage
    223
  • Abstract
    Flip chip bonding of chips coated with wafer-level underfill over optically transparent glass substrate allows ease of inspection of flip chip bonding quality immediately, without the use of equipment such as SEM, CSAM or the need for highly-trained staff to interpret results. This method is inexpensive to implement, while intuitive to the engineer identifying responses to parametric changes in the flip chip bonding process. Our work complements the existing tomography techniques used to evaluate flip chip quality and reduces the amount of laborious cross-sectioning needed, adding new perspectives to evaluating flip chip bonding quality. We identified indicators of good bonding responses to our process parameters in bonding wafer-level underfill chips over glass substrate. This allows relationships to be quickly established and phenomena to be assigned. This evaluative method was inexpensive to implement, and with results that are intuitive to interpret.
  • Keywords
    bonding processes; flip-chip devices; glass; wafer level packaging; bonding responses; crosssectioning; engineer identifying responses; flip chip bonding process; flip chip bonding quality; optically transparent glass substrate; parametric changes; tomography techniques; wafer-level underfill chips; Bonding; Bonding forces; Flip-chip devices; Force; Glass; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics Packaging Technology Conference (EPTC 2013), 2013 IEEE 15th
  • Conference_Location
    Singapore
  • Print_ISBN
    978-1-4799-2832-3
  • Type

    conf

  • DOI
    10.1109/EPTC.2013.6745716
  • Filename
    6745716