DocumentCode
3362688
Title
Intuitive and inexpensive method to evaluate flip chip bonding parameters of micro bump with wafer-level underfill material using glass substrate
Author
Jie Li Aw ; Ser Choong Chong ; Cereno, Daniel Ismael ; KengHwa Teo ; Rao, V. Srinivasa
Author_Institution
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
fYear
2013
fDate
11-13 Dec. 2013
Firstpage
219
Lastpage
223
Abstract
Flip chip bonding of chips coated with wafer-level underfill over optically transparent glass substrate allows ease of inspection of flip chip bonding quality immediately, without the use of equipment such as SEM, CSAM or the need for highly-trained staff to interpret results. This method is inexpensive to implement, while intuitive to the engineer identifying responses to parametric changes in the flip chip bonding process. Our work complements the existing tomography techniques used to evaluate flip chip quality and reduces the amount of laborious cross-sectioning needed, adding new perspectives to evaluating flip chip bonding quality. We identified indicators of good bonding responses to our process parameters in bonding wafer-level underfill chips over glass substrate. This allows relationships to be quickly established and phenomena to be assigned. This evaluative method was inexpensive to implement, and with results that are intuitive to interpret.
Keywords
bonding processes; flip-chip devices; glass; wafer level packaging; bonding responses; crosssectioning; engineer identifying responses; flip chip bonding process; flip chip bonding quality; optically transparent glass substrate; parametric changes; tomography techniques; wafer-level underfill chips; Bonding; Bonding forces; Flip-chip devices; Force; Glass; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Packaging Technology Conference (EPTC 2013), 2013 IEEE 15th
Conference_Location
Singapore
Print_ISBN
978-1-4799-2832-3
Type
conf
DOI
10.1109/EPTC.2013.6745716
Filename
6745716
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