• DocumentCode
    3362729
  • Title

    Decomposition of gaseous organic contaminants by surface discharge induced plasma chemical processing-SPCP

  • Author

    Oda, Tetsuji ; Yamashita, Ryuuichi ; Haga, Ichiro ; Takahashi, Tadashi ; Masuda, Senichi

  • Author_Institution
    Dept. of Electr. Eng., Tokyo Univ., Japan
  • fYear
    1992
  • fDate
    4-9 Oct 1992
  • Firstpage
    1570
  • Abstract
    The decomposition performance of surface induced plasma chemical processing (SPCP) for chlorofluorocarbon, acetone, trichloroethylene, and isopropyl alcohol was experimentally examined. More than 90 or 99% removal rate was realized when the residence time was about 1 s and the input electric power for a 16 cm3 reactor was about 10 W. Acetone was the most stable material and alcohol was most easily decomposed. A gas-chromatograph-mass-spectrograph system was used for decomposition-product analysis. The decomposition of alcohol produced acetone as an undesirable byproduct of SPCD. The energy necessary to decompose one mole of each gas diluted in air was calculated from the experiments. The necessary energy for acetone and trichloroethylene was about one-tenth or one-twentieth of that for chlorofluorocarbon
  • Keywords
    chromatography; dissociation; mass spectroscopic chemical analysis; organic compounds; plasma applications; surface chemistry; surface discharges; 10 W; acetone; chlorofluorocarbon; decomposition performance; gas-chromatograph-mass-spectrograph system; gaseous organic contaminants; input electric power; isopropyl alcohol; surface discharge induced plasma chemical processing; trichloroethylene; Ceramics; Chemical processes; Chemical technology; Inductors; Organic chemicals; Plasma chemistry; Plasma materials processing; Surface contamination; Surface discharges; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Industry Applications Society Annual Meeting, 1992., Conference Record of the 1992 IEEE
  • Conference_Location
    Houston, TX
  • Print_ISBN
    0-7803-0635-X
  • Type

    conf

  • DOI
    10.1109/IAS.1992.244376
  • Filename
    244376