Fast-MoM based 2D and 3D rigorous models for the analysis of cantilever deflections in micromachined structures

Author

Baghai-Wadji, A.R. ; Koury, D.N., Jr.

Author_Institution

Vienna Univ. of Teclinology, Austria

Volume

2

fYear

2002

fDate

8-11 Oct. 2002

Firstpage

1063

Abstract

In this work we derive several equivalent representations for the Green\´s functions (GFs) associated with elastostatic problems. The resulting GFs allow the application of the Fast-MoM which is an extension of the widely-used Method of Moments. The Fast-MoM, a "data-recycling" scheme, enables accurate and fast computations based on precalculated Universal Functions (UFs). The UFs allow the application of an iterative procedure for the calculation of small- and large amplitude cantilever deflections in micromachined structures as we proposed at this conference two years ago.

Keywords

Green´s function methods; iterative methods; micromachining; ultrasonic transducers; Green´s functions; cantilever deflections; data-recycling scheme; elastostatic problems; equivalent representations; fast-MoM models; iterative procedure; method of moments; micromachined structures; Computational efficiency; Convergence; Electronics packaging; Electrostatics; Fabrics; Maxwell equations; Message-oriented middleware; Moment methods; Tensile stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE

ISSN

1051-0117

Print_ISBN

0-7803-7582-3

Type

conf

DOI

10.1109/ULTSYM.2002.1192478

Filename

1192478