Clustertool optimization through scheduling rules

Author

Lemmen, B. ; Van Campen, E.J.J. ; Roede, H. ; Rooda, J.E.

Author_Institution

Eindhoven Univ. of Technol., Netherlands

fYear

1999

fDate

1999

Firstpage

89

Lastpage

92

Abstract

Clustertools play an increasing important role in modern semiconductor fabs. These tools are complex and have a large impact on fab performance. In this paper, a structured approach is presented to give insight in the dynamic behavior of clustertools and to optimize their performance. The approach is applied to the metal area of a waferfab. Scheduling rules are defined for clustertools of this area. A dynamic simulation model is used to evaluate the rules. Experiments show that an average improvement of 8 percent on cycle time and throughput is achieved by usage of scheduling rules

Keywords

cluster tools; scheduling; semiconductor process modelling; clustertool optimization; cycle time; dynamic simulation model; scheduling rule; semiconductor fab; throughput; Application specific integrated circuits; Availability; Costs; Electronics industry; Foundries; Job shop scheduling; Performance analysis; Petroleum; Production facilities; Service robots;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on

Conference_Location

Santa Clara, CA

ISSN

1523-553X

Print_ISBN

0-7803-5403-6

Type

conf

DOI

10.1109/ISSM.1999.808745

Filename

808745