Research on normal vibration modes and lateral standing wave in MEMS ultrasonic separator

In this paper a structure model of Micro Electro Mechanical System (MEMS) ultrasonic separator which is based on the two-dimensional normal vibration modes is presented and the resonance frequencies of the two-dimensional normal vibration modes and lateral standing wave are explored. First, in accordance with the theory of electricity-sound analogy, a two-dimensional equivalent network of the ultrasonic separator was figured out. From this network, the resonance frequencies of the two-dimensional normal vibration modes and lateral standing wave were characterized. Then this was also demonstrated through comparing the simulation results of the ultrasonic separator in different exciting models with finite-element method. It has been shown that the results of the two methods mentioned above match well with each other. The effect of lateral standing wave was also observed in the experiment.