Author index

fYear

1999

fDate

11-13 Oct. 1999

Firstpage

467

Lastpage

469

Abstract

The author index contains an entry for each author and coauthor included in the proceedings record.

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on

Conference_Location

Santa Clara, CA, USA

ISSN

1523-553X

Print_ISBN

0-7803-5403-6

Type

conf

DOI

10.1109/ISSM.1999.808836

Filename

808836

Link To Document