Preparation and application of benzoguanamine formaldehyde/silica composite abrasives slurry

Author

Xu Xuefeng ; Yuzhi, Yang ; Guo Quan ; Weiwei, Hong ; Wei, Peng

Author_Institution

Key Lab. of Special Purpose Equip. & Adv. Process. Technol., Zhejiang Univ. of Technol., Hangzhou, China

fYear

2010

fDate

26-28 June 2010

Firstpage

6032

Lastpage

6035

Abstract

In order to improve the adsorption capacity between polymer particles and abrasives in composite abrasive slurry, the adsorption characteristics of PDADMAC on BGF particles and changes of BGF particles´ Zeta potential have been investigated. Two kinds of composite abrasive slurry were obtained with BGF particles before and after modified, and their polishing performance were studied by experiments. Experimental results show: at pH=10.5, the saturated adsorption of PDADMAC on BGF particles was about 3.67mg/g, and Zeta potential was increased from -42.3mV to 35mV; the adsorption capacity of SiO₂ abrasives on BGF particles was improved after modified; the polishing rate was 469nm/min with the modified BGF/SiO₂ composite abrasives slurry, increasing by 47% than that of the original BGF/SiO₂ composite abrasives slurry.

Keywords

abrasives; adsorption; chemical mechanical polishing; composite materials; electrokinetic effects; organic compounds; silicon compounds; slurries; BGF particles; PDADMAC; SiO₂; Zeta potential; adsorption capacity; benzoguanamine formaldehyde-silica composite abrasives slurry; polishing performance; polymer particles; Abrasives; Chemical industry; Educational technology; Laboratories; Polymers; Silicon compounds; Slurries; Chemical Mechanical Polishing (CMP); composite abrasives; polishing slurry; polyelectrolyte;

fLanguage

English

Publisher

ieee

Conference_Titel

Mechanic Automation and Control Engineering (MACE), 2010 International Conference on

Conference_Location

Wuhan

Print_ISBN

978-1-4244-7737-1

Type

conf

DOI

10.1109/MACE.2010.5536787

Filename

5536787