A 3V Operation RF MEMS Variable Capacitor using Piezoelectric and Electrostatic Actuation with Lithographical Bending Control

Author

Ikehashi, T. ; Ogawa, E. ; Yamazaki, H. ; Ohguro, T.

Author_Institution

Toshiba Corp. Semicond. Co., Yokohama

fYear

2007

fDate

10-14 June 2007

Firstpage

149

Lastpage

152

Abstract

A 3 V operation RF MEMS variable capacitor using hybrid actuation of piezoelectric and electrostatic forces is presented. Bending of the piezoelectric actuator is controlled by a lithographical pattern formed on top of the actuator. The hybrid actuation and the optimized bending enabled 2.6 V pull- in voltage with the pull-out voltage as high as 2.0 V The measured capacitance ratio is 14.

Keywords

capacitors; electrostatic actuators; piezoelectric actuators; RF MEMS variable capacitor; electrostatic actuation; electrostatic force; hybrid actuation; lithographical bending control; microelectromechanical system; piezoelectric actuation; piezoelectric actuator bending; piezoelectric force; voltage 3 V; Capacitors; Electric variables control; Electrostatic actuators; Low voltage; Mobile handsets; Piezoelectric actuators; Piezoelectric films; Radiofrequency microelectromechanical systems; Residual stresses; Solid state circuits; Bending; PZT; Piezoelectric; RF MEMS; Variable Capacitor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300093

Filename

4300093