Power Efficient V-Shape Electro-Thermal Actuator using Constrained SU-8

This paper presents the design, simulation and characterization of a V-shape thermal actuator, which incorporates silicon/SU-8 composite. The design exploits the confined SU-8 layers in the composite for effective thermal actuation. The micro-fabricated actuator (1000-mum long, 56-mum wide, 60- mum high, 15deg bent) demonstrates a large in-plane motion (10 mum) at a 1.75-V driving voltage, consuming low power (16 mW) and operating at a relatively low temperature (125degC). It is estimated to produce a blocked apex force of 100 mN at 1.75 V.