Comparison of Bulge Test and Point Deflection Methods for the Mechanical Characterisation of Submicron Thick Composite Membranes

Author

Martins, P. ; Delobelle, P. ; Malhaire, C. ; Brida, S. ; Barbier, D.

Author_Institution

INSA Lyon, Villeurbanne

fYear

2007

fDate

10-14 June 2007

Firstpage

379

Lastpage

382

Abstract

The aim of this work is to compare two methods for the determination of thin films Young´s modulus and stress state: the bulge test and the point-deflection methods. The tested structures are silicon nitride and bilayers silicon nitride/silicon oxide membranes with thicknesses down to 100 nm. We report new experimental results for different shapes (square or rectangular) and dimensions.

Keywords

Young´s modulus; composite materials; materials testing; mechanical testing; membranes; nanostructured materials; silicon compounds; stress analysis; thin films; SiN-SiO; Young´s modulus; bulge test method; mechanical characterisation; point deflection method; rectangular shape; silicon nitride/silicon oxide membrane bilayers; square shape; stress state; submicron thick composite membranes; thin film thickness; Biomembranes; Finite element methods; Mechanical sensors; Sensor phenomena and characterization; Shape; Silicon; Stress; Testing; Thick film sensors; Thin film sensors; Bulge test; mechanical properties; nanoindentation; point deflection method;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300147

Filename

4300147