Dynamic Pull-In and Switching for Sub-Pull-In Voltage Electrostatic Actuation

Author

Nielson, G.N. ; Olsson, R.H., III ; Bogart, G.R. ; Resnick, P.R. ; Spahn, O.B. ; Tigges, C. ; Grossetete, G. ; Barbastathis, G.

Author_Institution

Sandia Nat. Lab., Albuquerque

fYear

2007

fDate

10-14 June 2007

Firstpage

455

Lastpage

459

Abstract

We propose and experimentally demonstrate a new MEMS switching technique using elastic potential energy to drive switching with electrostatic force used for switch control. This approach allows switching into pulled-in states at voltages significantly less than the quasi-static pull-in voltage. We have demonstrated switching into a pulled-in position using voltages much less than the pull-in voltage with a large torsional MEMS mirror, a high-speed torsional MEMS mirror, and a high-speed rectilinear MEMS switch that operates horizontally. Both high-speed devices have demonstrated switching in less than 500 ns over relatively large gaps.

Keywords

electrostatic actuators; micromirrors; microswitches; MEMS switching technique; dynamic pull-in voltage; elastic potential energy; electrostatic actuation; electrostatic force; high-speed torsional MEMS mirror; microelectromechanical system; switch control; Electrodes; Electrostatic actuators; Force control; High speed optical techniques; Micromechanical devices; Microswitches; Mirrors; Potential energy; Switches; Voltage; MEMS actuation; MEMS switching; high-speed switching; micromirrors; optical switching;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300166

Filename

4300166