An assessment of physical and electrical design rule based statistical process monitoring and modeling (PEDR-SPMM): for foundry manufacturing line of multiple-product mixed-run

Author

Doong, Kelvin Yih-Yuh ; Hsieh, Sunnys ; Lin, S.C. ; Hung, L.J. ; Wang, Robin J. ; Shen, Binson ; Hisa, J.W. ; Guo, J.C. ; Chen, I.C. ; Young, K.L. ; Hsu, Charles Ching-Hsiang

Author_Institution

Taiwan Semicond. Manuf. Corp., Shinchu, Taiwan

fYear

2002

fDate

8-11 April 2002

Firstpage

55

Lastpage

59

Abstract

A novel methodology of physical and electrical design rule based statistical process monitoring and modeling (PEDR-SPMM) was proposed. By the aid of principal component analysis, the correlated physical and electrical parameters are decomposed into an independent variable set. The key parameters of multiple products mixed-run could be formulated by the independent variable set, which reduce the modeling complexity, and also provide a way to get a comparison between different technology nodes.

Keywords

integrated circuit manufacture; principal component analysis; process monitoring; statistical process control; PEDR-SPMM; electrical design rule; foundry manufacturing line; in-line metrology; integrated circuit fab; multiple-product mixed-run; physical design rule; principal component analysis; process control monitor; statistical process modeling; statistical process monitoring; Foundries; Integrated circuit technology; Manufacturing processes; Metrology; Monitoring; Principal component analysis; Process control; Testing; Vehicles; Virtual manufacturing;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronic Test Structures, 2002. ICMTS 2002. Proceedings of the 2002 International Conference on

Print_ISBN

0-7803-7464-9

Type

conf

DOI

10.1109/ICMTS.2002.1193171

Filename

1193171