Selective Gas Sensor System for CO and H2 Distinction at High Temperatures Based on a Langasite Resonator Array

Author

Richter, D. ; Schneider, T. ; Doerner, S. ; Fritze, H. ; Hauptmann, P.

Author_Institution

Univ. of Appl. Studies & Res., Wernigerode

fYear

2007

fDate

10-14 June 2007

Firstpage

991

Lastpage

994

Abstract

A selective in-situ gas sensor system for CO and H₂ distinction at high temperatures has been developed based on an array of piezoelectric langasite resonators. Bulk acoustic wave resonators coated with different sensing films are operated in two different measurement modes which increases the selectivity of the gas sensor system. Simultaneously, a compact and rapid impedance analyzer for precise resonant frequency measurement of the strongly damped resonators has been developed and allows the standalone application for the sensor system.

Keywords

bulk acoustic wave devices; crystal resonators; fluorescence; gas sensors; alangasite resonator array; bulk acoustic wave resonators; gas sensor; impedance analyzer; piezoelectric langasite resonators; resonant frequency measurement; Acoustic measurements; Acoustic waves; Film bulk acoustic resonators; Gas detectors; Hydrogen; Impedance; Piezoelectric films; Resonant frequency; Sensor arrays; Temperature sensors; high temperatures; impedance analyzer; langasite; resonant gas sensor array;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300299

Filename

4300299