Measuring the electric and magnetic near fields in VLSI devices

Author

Slattery, Kevin ; Cui, Wei

Author_Institution

MIS Int., Madison, AL, USA

Volume

2

fYear

1999

fDate

1999

Firstpage

887

Abstract

This paper describes a technique for measurement of high frequency current distributions in microprocessors and other VLSI devices. The technique uses optical precision stepper motors for highly accurate placement of electric and magnetic field probes. Spatial resolution across a device is on the order of 100-200 micrometers. Typical scans accumulate 10000 data points across a scan area of approximately 35 mm ². Characterizing a device involves a repeated series of spatial scans at harmonics of the fundamental clock frequency

Keywords

VLSI; application specific integrated circuits; current distribution; electric field measurement; electromagnetic compatibility; integrated circuit testing; magnetic field measurement; microprocessor chips; ASIC; EMC; VLSI devices; electric field probes; electric near field measurement; fundamental clock frequency; harmonics; high frequency current distributions; highly accurate placement; magnetic field probes; magnetic near field measurement; microprocessors; optical precision stepper motors; spatial resolution; spatial scans; Current distribution; Current measurement; Electric variables measurement; Frequency measurement; Magnetic devices; Magnetic field measurement; Microprocessors; Probes; Spatial resolution; Very large scale integration;

fLanguage

English

Publisher

ieee

Conference_Titel

Electromagnetic Compatibility, 1999 IEEE International Symposium on

Conference_Location

Seattle, WA

Print_ISBN

0-7803-5057-X

Type

conf

DOI

10.1109/ISEMC.1999.810172

Filename

810172