DocumentCode
337954
Title
High power SAW filter with new Al-Sc-Cu/Ti/Al-Sc-Cu/Ti electrodes
Author
Takayama, R. ; Furukawa, M. ; Murashima, Y. ; Sakuragawa, T. ; Yuda, N. ; Nomura, K.
Author_Institution
Corporate Components Dev. Center, Matsushita Electron. Components Co. Ltd., Osaka, Japan
Volume
1
fYear
1998
fDate
1998
Firstpage
5
Abstract
High power SAW filters using newly developed Al-Sc-Cu/Ti/Al-Sc-Cu/Ti electrodes have been successfully achieved. The thickness of this new film can be controlled during the deposition process as easily as when using conventional Al-Cu alloy film, and this film can be formed into Inter Digital Transducer (IDT) electrodes using conventional Reactive Ion Etching (RIE). We evaluated the power durability of receiver top filters using the new electrodes. Results indicate that the lifetime of the new electrode system exceeds 900,000 hours at an ambient temperature of 85°C and input power of 3l dBm, about 1,000,000 times longer under these conditions than conventional Al-Cu alloy electrode systems. The new electrodes have clear potential for use in Advanced Mobile Phone Service (AMPS) and code division multiple access (CDMA) system SAW duplexers
Keywords
aluminium alloys; copper alloys; electrodes; power filters; scandium alloys; surface acoustic wave filters; titanium; 85 C; AMPS/CDMA duplexer; Al-Sc-Cu/Ti/Al-Sc-Cu/Ti electrode; AlScCu-Ti-AlScCu; film deposition; high power SAW filter; interdigital transducer; lifetime; power durability; reactive ion etching; receiver; Digital alloys; Electrodes; Etching; Mobile handsets; Multiaccess communication; SAW filters; Surface acoustic waves; Temperature; Thickness control; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 1998. Proceedings., 1998 IEEE
Conference_Location
Sendai
ISSN
1051-0117
Print_ISBN
0-7803-4095-7
Type
conf
DOI
10.1109/ULTSYM.1998.762090
Filename
762090
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