Microfabricated Gate-Modulated Electrochemical Ion Spectroscopy Sensor

Author

Tabib-Azar, M. ; Wang, R. ; Mutlu, S. ; Mastrangelo, C.H. ; Gianchandani, Y.B.

Author_Institution

Case Western Reserve Univ., Cleveland

fYear

2007

fDate

10-14 June 2007

Firstpage

2307

Lastpage

2310

Abstract

Flow-through field effect transistor structures are utilized as tunable, electrochemical ion- selective sensors to analyze the ionic content of channel fluids from drain-source current measurements and gate conductance spectroscopy. Compared to ion-selective electrodes in a flowFET its gate region acts as a programmable membrane determined by the gate potential. DC measurement results using aqueous solutions of NaCl and CuSO₄ in the 10^-4-10^-7 molar range are discussed.

Keywords

electrochemical sensors; field effect transistors; microsensors; spectroscopy; CuSO₄; NaCl; channel fluid; drain-source current measurement; field effect transistor structure; gate conductance spectroscopy; ionic content; microfabricated gate-modulated electrochemical ion spectroscopy sensor; molar range; tunable sensor; Actuators; Contacts; Electrodes; FETs; Fluid flow control; Frequency; Intrusion detection; Solid state circuits; Spectroscopy; Voltage; EOF; Ion selective sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300631

Filename

4300631