Variable Nano-Grating for Tunable Filters

Author

Zhang, X.M. ; Zhao, Q.W. ; Zhong, T. ; Yu, A.B. ; Khoo, E.H. ; Lu, C. ; Liu, A.Q.

Author_Institution

Nanyang Technol. Univ., Singapore

fYear

2007

fDate

10-14 June 2007

Firstpage

2417

Lastpage

2420

Abstract

This paper presented the design of subwavelength grating (i.e., nano-grating) for narrow-band and wide-band filter applications. The grating period can be tuned from 700 nm to 1140 nm by a rhombic-shaped thermal actuator array with a driving current of 2.7 mA, achieving a change of transmissivity by 13 dB due to the guided mode resonance. Wide-band of filtering can be obtained by use of another fixed-period grating to compensate the dispersion. Such grating design makes it practical to implement many tunable nano-optical devices.

Keywords

diffraction gratings; micromechanical devices; nanotechnology; current 2.7 mA; fixed-period grating; microelectromechanical system; nanograting; nanooptical device; narrow-band filter; subwavelength grating; thermal actuator array; transmissivity; tunable filter; wide-band filter; Actuators; Design engineering; Gratings; Information filtering; Information filters; Micromechanical devices; Narrowband; Optical filters; Resonance; Wideband; Microelectromechanical systems (MEMS); nano-optics; subwavelength grating; thermal actuator; tunable filter;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300658

Filename

4300658