Ball Surface Acoustic Wave Hydrogen Sensor with Widest Sensing Range and Fast Response

Author

Yamanaka, K. ; Abe, T. ; Iwata, N. ; Tsuji, T. ; Mihara, T. ; Akao, S. ; Noguchi, K. ; Nakaso, N. ; Sim, D. ; Takeda, N. ; Ebi, Y. ; Fukiura, T. ; Tanaka, H.

Author_Institution

Tohoku Univ., Sendai

fYear

2007

fDate

10-14 June 2007

Firstpage

2549

Lastpage

2552

Abstract

SAW(surface acoustic wave) excited on a spherical surface under a specific condition is naturally collimated, realizing ultra-multiple roundtrips along an equator of the sphere. The ball SAW hydrogen gas sensor is based on this newly discovered phenomenon, and uses a very thin Pd-Ni alloy sensitive film. The detection range for hydrogen gas was 10 ppm to 100% and the response time was less than Is for 3.0% hydrogen concentration in nitrogen gas, evaluated by using a newly developed digital quadrature detector (DQD).

Keywords

gas sensors; surface acoustic wave transducers; ball surface acoustic wave hydrogen sensor; digital quadrature detector; hydrogen concentration; hydrogen gas sensor; spherical surface; ultramultiple roundtrips; Acoustic sensors; Acoustic signal detection; Acoustic waves; Collimators; Delay; Gas detectors; Hydrogen; Nitrogen; Sensor phenomena and characterization; Surface acoustic waves; DQD; ball SAW sensor; hydrogen gas sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300691

Filename

4300691