On-Chip Scanning Confocal Microscope with 3D MEMS Scanner and VCSEL Feedback Detection

Author

Gorecki, C. ; Nieradko, L. ; Bargiel, S. ; Dziuban, J. ; Henis, D. ; Sylvestre, J.A. ; Alkowska, K. ; Soto-Romero, G. ; Thevenet, J. ; Yahiaoui, R.

Author_Institution

Univ. de Franche-Comte, Besancon

fYear

2007

fDate

10-14 June 2007

Firstpage

2561

Lastpage

2564

Abstract

We propose an original approach of a miniature scanning confocal microscope that uses two electrostatic scanners with microoptical lenses. For this chip-scale microscope, we demonstrated the use of optical feedback of VCSEL´s laser as an active detection. The z-axis scanner will provide a vertical motion of the first microlens in the range of 100 mum, controlling the focal length of the objective. Raster scanning (30 mum in both directions) of a specimen by the focused illumination spot will be implemented by actuating of second microlens by x-y-axis scanner.

Keywords

image scanners; integrated optics; lab-on-a-chip; laser feedback; micro-optomechanical devices; microactuators; microlenses; optical microscopy; optical scanners; surface emitting lasers; 3D MEMS scanner; VCSEL feedback detection; comb-drive actuator; electrostatic scanners; focal length control; focused illumination spot; microoptical lenses; on-chip miniature scanning confocal microscope; optical MEMS; reflow; Electrostatics; Laser feedback; Lenses; Lighting; Micromechanical devices; Microoptics; Motion control; Optical feedback; Optical microscopy; Vertical cavity surface emitting lasers; Optical MEMS; comb-drive actuator; confocal microscopy; reflow microlens;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International

Conference_Location

Lyon

Print_ISBN

1-4244-0842-3

Electronic_ISBN

1-4244-0842-3

Type

conf

DOI

10.1109/SENSOR.2007.4300694

Filename

4300694