Enhanced large signal performance of PZT thick film actuators for active micro-optics

Author

Ernst, Damien ; Bramlage, Bernhard ; Gebhardt, S. ; Schonecker, A. ; Pabst, O. ; Schreiner, Hans-Jurgen

Author_Institution

Fraunhofer Inst. for Ceramic Technol. & Syst. (IKTS), Dresden, Germany

fYear

2013

fDate

21-25 July 2013

Firstpage

5

Lastpage

8

Abstract

Screen-printed lead zirconate titanate (PZT) thick film actuators are beneficial for miniaturized devices due to their flat profile and accurate net-shaped fabrication. Sintering progress and piezoelectric performance depend on the type and amount of sintering additive. Cantilever structures were fabricated by the use of screen printing technology with a systematic variation of the sintering additive content and for two different piezoceramic base materials. Their microstructure, small and large signal properties were characterized. Based on the experimental data we developed an actuator frame to lift a micro-lens array within a low-profile microscope by 115 μm.

Keywords

additives; cantilevers; lead compounds; microactuators; microlenses; piezoceramics; sintering; thick film devices; PZT; PZT thick film actuators; active micro-optics; cantilever structures; enhanced large signal performance; low-profile microscope; microlens array; microstructure; net-shaped fabrication; piezoceramic base materials; piezoelectric performance; screen-printed lead zirconate titanate; signal properties; sintering additive; sintering progress; Actuators; Displacement measurement; Fabrication; Films; Substrates; Actuator; Cantilever; PZT; Screen Printing; Thick Film;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectric and Workshop on the Piezoresponse Force Microscopy (ISAF/PFM), 2013 IEEE International Symposium on the

Conference_Location

Prague

Type

conf

DOI

10.1109/ISAF.2013.6748714

Filename

6748714