RF filter tuning using embedded MEMS actuators

This paper presents a new approach to compensate for the fabrication tolerance of micromachined filters by employing MEMS actuators. Fine tuning micromachined filters is achieved by disturbing the electromagnetic field distribution of resonators with nearby MEMS actuators. The structure was analyzed both theoretically and experimentally. A micromachined filter with embedded MEMS actuators as tuning elements has been designed, fabricated and tested. The measured results have demonstrated the proposed concept. Furthermore, A tunable filter with up to 1 GHz tuning range can also be achieved by using these MEMS actuators with a slightly modified fabrication process.