DocumentCode
3400865
Title
Recent advances in high voltage SOI technology for motor control and automotive applications
Author
Nakagawa, Akio
Author_Institution
Mater. & Devices Lab., Toshiba Corp., Kawasaki, Japan
fYear
1996
fDate
29 Sep-1 Oct 1996
Firstpage
69
Lastpage
72
Abstract
One of the drawbacks of the conventional high voltage SOI devices requires a thick buried oxide. In the present paper we propose a new high voltage SOI device structure which does not require a thick buried oxide. Second, we propose a method to reduce the chip size of high voltage power ICs by developing new LIGBTs, operating in a higher current density. Third, we demonstrate on-chip integration of MPUs, analog digital circuits and 60 V power NMOS for automotive applications
Keywords
BiCMOS integrated circuits; automotive electronics; insulated gate bipolar transistors; integrated circuit design; power integrated circuits; silicon-on-insulator; 60 V; LIGBTs; Si; automotive applications; chip size; current density; high voltage SOI technology; high voltage power ICs; motor control; on-chip integration; power NMOS; Automotive applications; CMOS technology; Diodes; Insulated gate bipolar transistors; Integrated circuit technology; Motor drives; Paper technology; Power integrated circuits; Silicon; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Bipolar/BiCMOS Circuits and Technology Meeting, 1996., Proceedings of the 1996
Conference_Location
Minneapolis, MN
ISSN
1088-9299
Print_ISBN
0-7803-3516-3
Type
conf
DOI
10.1109/BIPOL.1996.553944
Filename
553944
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