From the MEMS idea to the MEMS product: CAD and foundries

Author

Karam, J.M. ; Courtois, B.

Author_Institution

TIMA/CMP, Grenoble, France

fYear

1996

fDate

22-24 Oct 1996

Firstpage

73

Lastpage

78

Abstract

Besides foundry facilities, computer-aided design (CAD) tools are also required to move microsystems from research prototypes to an industrial market. Currently available CAD tools need extensions before they can be used for the automated design of micromachined devices. This paper presents a low cost access to microsystem technology (MST), applied by the CMP service, and based on the use of existing microelectronics production lines, with additional post-processing for microsystem specific 2D and 3D structures, and a global CAD approach for the design and simulation of microsystems applied to currently available commercial CAD tools, e.g. Mentor Framework, in order to ensure a continuous flow from the design to the manufacturing

Keywords

CAD/CAM; circuit CAD; design for manufacture; micromechanical devices; 2D structures; 3D structures; CAD; MEMS; Mentor Framework; automated design; commercial CAD tools; computer-aided design; continuous flow; design; foundries; global CAD approach; industrial market; microelectronics production lines; micromachined devices; microsystem technology; microsystems; post-processing; research prototypes; simulation; Costs; Design automation; Foundries; Manufacturing; Microelectronics; Micromachining; Micromechanical devices; Production; Prototypes; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

WESCON/96

Conference_Location

Anaheim, CA

ISSN

1095-791X

Print_ISBN

0-7803-3274-1

Type

conf

DOI

10.1109/WESCON.1996.553966

Filename

553966