DocumentCode
3403966
Title
Evaluation of Scale Dependent of Fast Fracture Strength of Micro Component
Author
Okazaki, Toshikazu ; Nakamura, Shunsuke ; Hirata, Hideyuki ; Mihara, Yutaka ; Yoshimura, Hidenori
Author_Institution
Kagawa Univ., Takamatsu
fYear
2007
fDate
5-8 Aug. 2007
Firstpage
1096
Lastpage
1101
Abstract
In order to design the MEMS having good reliability, it is necessary to know the mechanical properties such as strength, fracture toughness and fatigue strength of micro components. In this paper, the fatigue testing machine was made. The examination of the fast fracture strength against the several kinds of specimens which dimensions were different each other was carried out. And volume dependency of the strength was discussed.
Keywords
fatigue testing; fracture toughness; micromechanical devices; MEMS; fast fracture strength; fatigue strength; fatigue testing machine; fracture toughness; micro component; volume dependency; Actuators; Design engineering; Fatigue; Force control; Mechanical factors; Mechanical systems; Micromechanical devices; Reliability engineering; Silicon; Testing; Actuator Design; Elements; Mechanisms; Micro and Nano Systems; Modeling; Novel Actuator Systems; Simulation Techniques and Methodologies; Structures;
fLanguage
English
Publisher
ieee
Conference_Titel
Mechatronics and Automation, 2007. ICMA 2007. International Conference on
Conference_Location
Harbin
Print_ISBN
978-1-4244-0828-3
Electronic_ISBN
978-1-4244-0828-3
Type
conf
DOI
10.1109/ICMA.2007.4303701
Filename
4303701
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