Synthesis of CNT-SnO2 and CNT-In2O3 films for micro sensor application using vacuum microelectronics technology

CNT-SnO₂ and CNT-In₂O₃ composite materials were prepared for micro sensor application. Micro sensors with CNT-SnO₂ and CNT-In₂O₃ films were designed and fabricated using microelectronics technology on the silicon substrate prefabricated with Pt electrodes and heater. Gas sensing properties of the sensors were tested against combustible gases, such as H₂, CO, CH₄, C₃H₈, and NO₂, which are common pollutant in the air. The CNT-SnO₂ and CNT-In₂O₃ composites showed higher sensitivity and selectivity to H₂, NO₂ and CO respectively. The present gas sensors are low energy consuming portable sensor module that can be mass-produced applying the synthesized nano gas sensing materials using vacuum microelectronics technology.