• DocumentCode
    3410680
  • Title

    SHF-range surface acoustic wave interdigital transducers using electron beam exposure

  • Author

    Yamanouchi, K. ; Cho, Y. ; Meguro, T.

  • Author_Institution
    Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
  • fYear
    1988
  • fDate
    2-5 Oct 1988
  • Firstpage
    115
  • Abstract
    Nanometer electrodes of 0.085-μm width have been fabricated using direct electron beam lithography, normal lift-off techniques, and an I2-plasma cleaning system. These techniques have been applied to interdigital transducers used as surface acoustic wave (SAW) transducers in the SHF range. SAW filters experiments were performed in the SHF-range. Filters with minimum insertion loss of 15.0 dB at the center frequency of 5 GHz and 24 dB at 11 GHz were obtained
  • Keywords
    surface acoustic wave devices; ultrasonic transducers; 11 GHz; 5 GHz; 85 nm; I2-plasma cleaning; SAW; SHF-range surface acoustic wave interdigital transducers; electron beam exposure; transducers; ultrasonic; Acoustic transducers; Acoustic waves; Cleaning; Electrodes; Electron beams; Frequency; Insertion loss; Lithography; SAW filters; Surface acoustic waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1988. Proceedings., IEEE 1988
  • Conference_Location
    Chicago, IL
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1988.49352
  • Filename
    49352
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3410680