• DocumentCode
    3411982
  • Title

    Electrostatic properties of molecular gated BioFETs

  • Author

    Shaked, M. ; Shaya, O. ; Doron, A. ; Cohen, A. ; Levy, I. ; Rosenwaks, Y.

  • Author_Institution
    Dept. of Phys. Electron., Tel-Aviv Univ., Ramat-Aviv
  • fYear
    2008
  • fDate
    June 30 2008-July 2 2008
  • Firstpage
    2056
  • Lastpage
    2059
  • Abstract
    We combine Kelvin probe force microscopy and current-voltage measurements in order to characterize silicon-oninsulator biological field effect transistors. The measurements were conducted on monolayer of (3-aminopropyl)-trimethoxysilane, which was deposited on a plasma activated silicon oxide surface of the transistor channel. The work function of the modified silicon oxide decreased by more then 2 eV as a function of the chemical treatment time. The current-voltage measurements preformed on the same devices showed a very large decrease (~10 V) in the threshold voltage of the transistors following the chemical modification. A consequent increase of almost 3 orders of magnitude in the drain-source current was also observed. The (3-aminopropyl)-trimethoxysilane induced charge redistribution effects on the transistor channel surface are analyzed and discussed.
  • Keywords
    electrostatics; field effect transistors; silicon-on-insulator; Kelvin probe force microscopy; current-voltage measurements; drain-source current; electrostatic properties; induced charge redistribution; molecular gated BioFET; silicon-on-insulator biological field effect transistors; Chemicals; Current measurement; Electrostatic measurements; FETs; Force measurement; Kelvin; Microscopy; Plasma measurements; Probes; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Industrial Electronics, 2008. ISIE 2008. IEEE International Symposium on
  • Conference_Location
    Cambridge
  • Print_ISBN
    978-1-4244-1665-3
  • Electronic_ISBN
    978-1-4244-1666-0
  • Type

    conf

  • DOI
    10.1109/ISIE.2008.4677125
  • Filename
    4677125