Research on Micro-Electro-Mechanical-Systems Digital Geophone

Author

Zhang, Xiaodan ; Ke, Xizheng ; Zhang, Zhiyu

Author_Institution

Inst. of Autom. & Inf. Eng., Xi´´an Univ. of Technol., Xi´´an, China

Volume

3

fYear

2010

fDate

23-24 Oct. 2010

Firstpage

414

Lastpage

417

Abstract

Geophone is a special purpose sensor which can translate the mechanical vibration into the electrical signal. Micro-Electro-Mechanical Systems (MEMS) digital geophone is the one of the most advanced geophones at present. This paper researches on the internal structure of MEMS digital geophone and its working principle, and then a close circuit system of MEMS digital geophone is build according to the performance analysis experiments. The simulation results show the effectiveness and feasibility of the build MEMS digital geophone´s close circuit system.

Keywords

digital circuits; micromechanical devices; seismometers; MEMS digital geophone internal structure; MEMS digital geophone working principle; close circuit system; microelectromechanical systems digital geophone; performance analysis; Accelerometers; Automation; Damping; Mathematical model; Micromechanical devices; Robot sensing systems; Sensitivity; Micro-Electro-Mechanical Systems (MEMS); close circuit; digital geophone; electrical signal; mechanical vibration;

fLanguage

English

Publisher

ieee

Conference_Titel

Artificial Intelligence and Computational Intelligence (AICI), 2010 International Conference on

Conference_Location

Sanya

Print_ISBN

978-1-4244-8432-4

Type

conf

DOI

10.1109/AICI.2010.324

Filename

5656394