Photonic crystal tuned by cantilever

Author

Takahata, Tomoyuki ; Hoshino, Kazunori ; Matsumoto, Kiyoshi ; Shimoyama, Isao

Author_Institution

Dept. of Mechano-Informatics, Tokyo Univ., Japan

fYear

2005

fDate

30 Jan.-3 Feb. 2005

Firstpage

112

Lastpage

115

Abstract

The purpose of our research is to tune two-dimensional (2D) slab photonic crystal (PhC) reflectors by inserting an AFM cantilever into one of the air holes. The 2D slab PhCs have column-shaped air holes on the triangular lattice in silicon air-bridge waveguide. The PhCs act as optical reflectors because of their photonic band gap. First, we estimated the effect of the cantilever insertion on the transmittance of the PhC reflectors with the finite difference time domain (FDTD) method. Then, we fabricated PhC reflectors by electron beam (EB) lithography and DRIE. Finally, we inserted the cantilever into one of their air holes. The transmittance with the cantilever was about twice as large as the original transmittance. The results proved that we could tune the transmittance of the PhC reflectors.

Keywords

electron beam lithography; finite difference time-domain analysis; optical tuning; optical waveguides; photonic crystals; sputter etching; 2D slab photonic crystal reflectors; AFM cantilever; PhC reflectors; air holes; deep reactive ion etching; electron beam lithography; finite difference time domain method; optical reflectors; photonic band gap; silicon air-bridge waveguide; triangular lattice; Electron beams; Electron optics; Finite difference methods; Lattices; Optical waveguides; Photonic band gap; Photonic crystals; Silicon; Slabs; Time domain analysis;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

ISSN

1084-6999

Print_ISBN

0-7803-8732-5

Type

conf

DOI

10.1109/MEMSYS.2005.1453880

Filename

1453880