Microfabricated plastic 95-GHz rectangular waveguide

Author

Sammoura, Firas ; Su, Yu-Chuan ; Cai, Wng ; Chi, Chen-Yu ; Elamaran, Bala ; Lin, Liwei ; Chiao, Jung-Chih

Author_Institution

Dept. of Mech. Eng., California Univ., Berkeley, CA, USA

fYear

2005

fDate

30 Jan.-3 Feb. 2005

Firstpage

167

Lastpage

170

Abstract

A plastic, 95-GHz rectangular waveguide with an integrated plastic flange has been successfully demonstrated using micro hot embossing and electroplating technologies. The prototype device shows s₁₁ and s₂₁ values of -20.7 dB and -1.35 dB at 95GHz, respectively, and the signal transmission rate is 73.3% as compared to commercial all-metal waveguides at 85%. The time domain measurement showed the system losses are mainly due to the discontinuity losses at the interfaces between the network analyzer adaptors and the waveguide input/output ports and could be further minimized in future integrated systems. As such, this new class of plastic waveguides has potential applications in replacing the expensive yet bulky/heavy metallic waveguides in current millimeter-wave systems.

Keywords

S-parameters; electroplating; embossing; micromachining; millimetre wave devices; plastics; rectangular waveguides; 95 GHz; discontinuity losses; electroplating technology; integrated plastic flange; metallic waveguides; micro hot embossing; microfabricated waveguide; millimeter-wave systems; network analyzer adaptors; plastic rectangular waveguide; system losses; time domain measurement; Embossing; Flanges; Loss measurement; Millimeter wave technology; Plastics; Prototypes; Rectangular waveguides; Time domain analysis; Time measurement; Waveguide discontinuities;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

ISSN

1084-6999

Print_ISBN

0-7803-8732-5

Type

conf

DOI

10.1109/MEMSYS.2005.1453893

Filename

1453893