Microfabricated spherical biconvex quartz crystal microbalance array

Author

Li, Li ; Abe, Takashi ; Esashi, Masayoshi

Author_Institution

Graduate Sch. of Eng., Tohoku Univ., Japan

fYear

2005

fDate

30 Jan.-3 Feb. 2005

Firstpage

327

Lastpage

330

Abstract

A miniaturized spherical bi-convex quartz crystal microbalance (QCM) array was fabricated by reactive ion etching (RIE) and photoresist reflow with solvent vapor technology. The spherical convex shape is necessary to suppress a spurious mode and obtain a high Q factor. Not only can the large-radius spherical convex shape be achieved by this technology, but also miniaturization and batch fabrication. The Q factor of the fabricated QCM (80000) is two times higher than that of the planar QCM, and the spurious mode around the fundamental vibration mode is suppressed very well. It also has superior resonant characteristic under the viscoelastic liquid.

Keywords

Q-factor; microbalances; photoresists; quartz; reflow soldering; sputter etching; Q factor; batch fabrication; miniaturization; photoresist reflow; reactive ion etching; resonant characteristic; solvent vapor technology; spherical biconvex quartz crystal microbalance array; viscoelastic liquid; Electrodes; Etching; Fabrication; Optical arrays; Optical microscopy; Optical resonators; Q factor; Resists; Shape; Solvents;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

ISSN

1084-6999

Print_ISBN

0-7803-8732-5

Type

conf

DOI

10.1109/MEMSYS.2005.1453933

Filename

1453933