Microfabricated finger-QCM array for ultrahigh sensitive gravimetry

Author

Li, Li ; Abe, Takashi ; Esashi, Masuyoshi

Author_Institution

Graduate Sch. of Eng., Tohoku Univ., Japan

fYear

2005

fDate

30 Jan.-3 Feb. 2005

Firstpage

331

Lastpage

334

Abstract

A miniaturized finger quartz crystal microbalance (QCM) array was fabricated by smooth surface deep-reactive-ion etching (deep-RlE) technology and transparent quartz glass stencil mask with two-level plane for alignment. The finger-QCM array was designed by reducing the support loss and the fixed part of it was made small compared with conventional inverted-mesa QCM. The Q factor of the finger QCM array is about 16000 for 52.1 MHz with 1 mm-electrode and 22000 for 41.7 MHz with 0.5mm-electrode. The Q factor of the finger-QCM is above 5 and 44 times greater than that of the inverted-mesa QCM at the same frequency and electrode diameter, respectively.

Keywords

Q-factor; density measurement; microbalances; quartz; small electric machines; sputter etching; 0.5 mm; 1 mm; 41.7 MHz; 52.1 MHz; deep-reactive-ion etching; finger-QCM array; inverted-mesa QCM; quartz crystal microbalance array; smooth surface; stencil mask; ultrahigh sensitive gravimetry; Biosensors; Electrodes; Energy dissipation; Fingers; Glass; Optical arrays; Optical microscopy; Q factor; Resonant frequency; Stability;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

ISSN

1084-6999

Print_ISBN

0-7803-8732-5

Type

conf

DOI

10.1109/MEMSYS.2005.1453934

Filename

1453934