DocumentCode
3422202
Title
Proceedings of Ninth International Workshop on Micro Electromechanical Systems
fYear
1996
fDate
11-15 Feb. 1996
Abstract
The following topics were dealt with: electrostatic actuators; fabrication; tribology and mechanical properties; design and modeling; physical sensors; accelerometers; applications
Keywords
accelerometers; electrostatic devices; microactuators; micromachining; micromechanical devices; microsensors; semiconductor device models; semiconductor technology; tribology; MEMS; accelerometers; applications; design; electrostatic actuators; fabrication; mechanical properties; microelectromechanical systems; modeling; physical sensors; tribology;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on
Conference_Location
San Diego, CA, USA
Print_ISBN
0-7803-2985-6
Type
conf
DOI
10.1109/MEMSYS.1996.493818
Filename
493818
Link To Document