DocumentCode
343659
Title
FSS array generation by optical means
Author
Lockyer, D.S. ; Vardaxoglou, J.C. ; Kearney, M.J.
Author_Institution
Loughborough Univ., UK
fYear
1999
fDate
April 1 1999-March 31 1999
Firstpage
132
Lastpage
135
Abstract
We have demonstrated a basic technique for optically generating arrays of periodic grids as a pseudo-metallic, electron-hole plasma region within a semiconductor wafer. The wafers used were high resistivity silicon to give dielectric-like dark behaviour, in order to contrast with the generated plasma. The theory of the work is based on the characterisation of the plasma by means of its surface impedance, which in turn is dependent on the complex permittivity. We have demonstrated theoretically, generation dimensions. Results have been presented in the frequency range 18-40 GHz to confirm that grids have been optically cast onto the wafers using negative image masks of the desired pattern.
Keywords
microstrip antenna arrays; 18 to 40 GHz; EHF; FSS array generation; SHF; Si; complex permittivity; dielectric-like dark behaviour; negative image masks; optical casting; periodic grids; planar antenna arrays; pseudo-metallic electron-hole plasma region; semiconductor wafer; surface impedance;
fLanguage
English
Publisher
iet
Conference_Titel
Antennas and Propagation, 1999. IEE National Conference on.
Conference_Location
York, UK
Print_ISBN
0-85296-713-6
Type
conf
Filename
788854
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