• DocumentCode
    343659
  • Title

    FSS array generation by optical means

  • Author

    Lockyer, D.S. ; Vardaxoglou, J.C. ; Kearney, M.J.

  • Author_Institution
    Loughborough Univ., UK
  • fYear
    1999
  • fDate
    April 1 1999-March 31 1999
  • Firstpage
    132
  • Lastpage
    135
  • Abstract
    We have demonstrated a basic technique for optically generating arrays of periodic grids as a pseudo-metallic, electron-hole plasma region within a semiconductor wafer. The wafers used were high resistivity silicon to give dielectric-like dark behaviour, in order to contrast with the generated plasma. The theory of the work is based on the characterisation of the plasma by means of its surface impedance, which in turn is dependent on the complex permittivity. We have demonstrated theoretically, generation dimensions. Results have been presented in the frequency range 18-40 GHz to confirm that grids have been optically cast onto the wafers using negative image masks of the desired pattern.
  • Keywords
    microstrip antenna arrays; 18 to 40 GHz; EHF; FSS array generation; SHF; Si; complex permittivity; dielectric-like dark behaviour; negative image masks; optical casting; periodic grids; planar antenna arrays; pseudo-metallic electron-hole plasma region; semiconductor wafer; surface impedance;
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    Antennas and Propagation, 1999. IEE National Conference on.
  • Conference_Location
    York, UK
  • Print_ISBN
    0-85296-713-6
  • Type

    conf

  • Filename
    788854