DocumentCode
3436932
Title
Plasma Polymers Obtained From Hexamethylisiloxane As Sorptive Layers For Humidity Sensors
Author
Radeva, E. ; Bobev, K.
Author_Institution
Institute of Solid State Physics, Bulgarian Academy of Sciences
fYear
1994
fDate
17-23 May 1994
Keywords
Glow discharges; Humidity measurement; Nuclear and plasma sciences; Physics; Plasma density; Plasma measurements; Plasma properties; Polymers; Sensor phenomena and characterization; Solid state circuits;
fLanguage
English
Publisher
ieee
Conference_Titel
Surface Waves in Solid and Layered Structures, 1994, and National Conference on Acoustoelectronics. 1994 International Symposium on. Program and Abstracts
Conference_Location
Moscow, Russia
Type
conf
DOI
10.1109/ISSWAS.1994.662563
Filename
662563
Link To Document