A μ-magnetometer based on electron tunneling

Author

Miller, L.M. ; Podosek, J.A. ; Kruglick, E. ; Kenny, T.W. ; Kovacich, J.A. ; Kaiser, W.J.

Author_Institution

Center for Space Microelectronics Technol., California Inst. of Technol., Pasadena, CA, USA

fYear

1996

fDate

11-15 Feb 1996

Firstpage

467

Lastpage

472

Abstract

In this paper, a working prototype of a μ-magnetometer based on electron tunneling is described. The tunneling μ-magnetometer offers a unique combination of advantages including high resolution (~10^-9 Tesla/√Hz), vector sensitivity, wide bandwidth (>10 kHz), low power (<100 mW), small size (1 cm×1 cm×0.6 mm), robustness, wide dynamic range (>100 dB), and small temperature coefficient. The preliminary noise equivalent magnetic field (NEB) for a prototype is 6 μT/√Hz, in good agreement with a device performance model. Linear response to increasing DC and AC magnetic fields is also demonstrated. Finally, work in progress to improve the NEB to 4 nT/√Hz is described

Keywords

magnetic field measurement; magnetometers; micromachining; microsensors; semiconductor device noise; space vehicle electronics; tunnelling; 0.6 mm; 1 cm; 10 kHz; 100 mW; bulk micromachining; device performance model; electron tunneling; high resolution; linear response; low power; magnetic field measurement; microelectromechanical sensor; noise equivalent magnetic field; robustness; small size; small temperature coefficient; spacecraft use; tunneling μ-magnetometer; vector sensitivity; wide bandwidth; wide dynamic range; Bandwidth; Dynamic range; Electrons; Magnetic fields; Noise robustness; Prototypes; Temperature distribution; Temperature sensors; Tunneling; Vectors;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on

Conference_Location

San Diego, CA

Print_ISBN

0-7803-2985-6

Type

conf

DOI

10.1109/MEMSYS.1996.494027

Filename

494027