DocumentCode
3437207
Title
Packaging and qualification of MEMS-based space systems
Author
Muller ; Hecht, M.H. ; Miller, L.M. ; Rockstad, H.K. ; Lyke, J.C.
Author_Institution
Center for Space Microelectronics Technol., California Inst. of Technol., Pasadena, CA, USA
fYear
1996
fDate
11-15 Feb 1996
Firstpage
503
Lastpage
508
Abstract
The number of spacecraft designed and built over the next century will grow exponentially as communication satellite networks proliferate and NASA continues to push towards the development of many microspacecraft to replace its traditional “grand tour” space vehicles. Costs in the space industry are measured in terms of weight (dollars per pound launched) and reliability. Unit costs pale in comparison to launch costs and the cost of replacing an entire vehicle in the case of a catastrophic failure. Space systems present a unique application for microelectromechanical systems (MEMS) technology which can be applied to miniaturize many of the subsystems in a space vehicle, and can improve overall reliability. This paper identifies potential applications of MEMS in a space system, describes space environmental factors, and reviews efforts to develop appropriate packaging and space qualification methodologies. Finally, a flight experiment for testing the performance of typical MEMS devices and packages in the space environment is described
Keywords
economics; environmental factors; micromechanical devices; semiconductor device manufacture; semiconductor device packaging; semiconductor device reliability; space vehicle electronics; MEMS; NASA; catastrophic failure; communication satellite networks; environmental factors; flight experiment; launch costs; microelectromechanical systems; microspacecraft; packaging; performance; reliability; space industry; space qualification; space systems; spacecraft; unit costs; weight; Aerospace industry; Artificial satellites; Costs; Micromechanical devices; NASA; Packaging; Qualifications; Space technology; Space vehicles; Telecommunication network reliability;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems. IEEE, The Ninth Annual International Workshop on
Conference_Location
San Diego, CA
Print_ISBN
0-7803-2985-6
Type
conf
DOI
10.1109/MEMSYS.1996.494033
Filename
494033
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