Error Analysis and Compensation of Precision Parallel Robot for Sensor Locating in ICF

One parallel robot had been developed to support the sensor and make it orient precisely in the test of Inertia! Confinement Fusion (ICF). In this paper some methods for improving the accuracy of parallel robot were discussed to guarantee the position accuracy of the sensor in vacuum environment. Firstly, error sources decreasing the accuracy of parallel robot were analyzed and some measures in structure design were adopted to improve the accuracy. Then error model of the robot was set up by the complete differential theory based on the parallel robot inverse kinematics equation. Therefore the position error of the robot could be reduced further by error compensation, which was realized through software. It´s proved by the experiments that the error model was of simple and effective, the locating accuracy of parallel robot could be improved through error compensation markedly and the position accuracy reached 1mum, which could satisfy the sensor locating accuracy requirement of ICF research.