DocumentCode
3446748
Title
Process sensors, simulation, and control to build in reliability
Author
Rubloff, Gary W.
Author_Institution
Dept. of Mater. & Nucl. Eng., Maryland Univ., College Park, MD, USA
fYear
1996
fDate
20-23 Oct 1996
Firstpage
50
Lastpage
56
Abstract
Building in reliability is fundamentally difficult because detailed mechanistic origins of reliability failures are not commonly known. Controlled process experiments and sophisticated characterization methods offer hope of revealing mechanisms more broadly. Real-time and in-line sensors present perhaps even more potential in two cases, (1) when their information is correlated with reliability performance, and (2) when used to achieve process control through course correction and/or fault management; the latter has special value in difficult situations where the reliability failure emerges from process integration sensitivities. Integrated modeling and simulation structures provide a vehicle for broad knowledge capture, an enabler of design optimization for reliability and other metrics, and a platform for effective process control
Keywords
chemical sensors; electric sensing devices; process control; reliability; broad knowledge capture; course correction; design optimization; fault management; process control; process integration sensitivities; process sensors; reliability failures; reliability performance; Annealing; Chemical processes; Chemical sensors; Chemical vapor deposition; Chemistry; FETs; Optical microscopy; Oxidation; Silicides; Surface cleaning;
fLanguage
English
Publisher
ieee
Conference_Titel
Integrated Reliability Workshop, 1996., IEEE International
Conference_Location
Lake Tahoe, CA
Print_ISBN
0-7803-3598-8
Type
conf
DOI
10.1109/IRWS.1996.583383
Filename
583383
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