• DocumentCode
    3447151
  • Title

    Discussion Group Summary Wafer-level Reliability Techniques

  • Author

    Pierce, D.G.

  • Author_Institution
    Sandia Technologies, Inc.
  • fYear
    1996
  • fDate
    20-23 Oct. 1996
  • Firstpage
    159
  • Lastpage
    160
  • Keywords
    Dielectrics; Diodes; Monitoring; Passivation; Plasma applications; Process control; Production; Qualifications; Research and development; Standardization;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Integrated Reliability Workshop, 1996., IEEE International
  • Conference_Location
    Lake Tahoe, CA, USA
  • Print_ISBN
    0-7803-3598-8
  • Type

    conf

  • DOI
    10.1109/IRWS.1996.583401
  • Filename
    583401