DocumentCode
3452151
Title
Polarized optical heterodyne laser scanning microscope
Author
Chien Chou ; Chung-Wei Lyu ; Li-Cheng Peng ; Sheau-Shi Pan
Author_Institution
Inst. of Radiol. Sci., Nat. Yang Ming Univ., Taipei, Taiwan
fYear
2001
fDate
11-11 May 2001
Firstpage
366
Lastpage
368
Abstract
Summary form only given. Optical heterodyne interferometry is widely used in the measurements of surface topography. In this paper, a novel polarized optical heterodyne interferometer associated with a differential amplifier is proposed. A surface topography of a holographic grating is successfully scanned.
Keywords
Mach-Zehnder interferometers; heterodyne detection; holographic gratings; optical beam splitters; optical microscopy; optical polarisers; optical scanners; optical testing; surface topography measurement; Mach-Zehnder interferometer; differential amplifier; heterodyne signals; holographic grating; laser intensity; polarized optical heterodyne laser scanning microscope; surface topography measurement; Differential amplifiers; Gratings; Holographic optical components; Holography; Optical interferometry; Optical microscopy; Optical mixing; Optical polarization; Stimulated emission; Surface topography;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2001. CLEO '01. Technical Digest. Summaries of papers presented at the Conference on
Conference_Location
Baltimore, MD, USA
Print_ISBN
1-55752-662-1
Type
conf
DOI
10.1109/CLEO.2001.947926
Filename
947926
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