DocumentCode
3452845
Title
High-Performance GaAs MISFETs with Self-Assembled Nanodielectrics
Author
Lin, H.C. ; Lu, G. ; Ye, P.D. ; Xuan, Y. ; Facchetti, A. ; Marks, T.J.
Author_Institution
School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN 47906
fYear
2006
fDate
26-28 June 2006
Firstpage
47
Lastpage
48
Keywords
Dielectrics and electrical insulation; Fabrication; Gallium arsenide; MISFETs; MOCVD; MOSFETs; Molecular beam epitaxial growth; Self-assembly; Surface treatment; Transconductance;
fLanguage
English
Publisher
ieee
Conference_Titel
Device Research Conference, 2006 64th
Conference_Location
State College, PA, USA
ISSN
1548-3770
Print_ISBN
0-7803-9748-7
Type
conf
DOI
10.1109/DRC.2006.305113
Filename
4097530
Link To Document