DocumentCode
3452979
Title
Experiment of EUV mirror contamination with use of undulator radiation
Author
Niibe, M. ; Kakutani, Yuji ; Kakiuchi, Kazuya ; Terashima, Shigeru ; Takase, Hiromitsu ; Gomei, Yoshio ; Aoki, Takashi ; Mtsunari, Shuichi ; Kondo, Hiroyuki ; Fukuda, Yasuaki
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
96
Lastpage
97
Keywords
Contamination; Laboratories; Life estimation; Life testing; Lithography; Mirrors; Pollution measurement; Reflectivity; Ultraviolet sources; Undulators;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245741
Filename
1459491
Link To Document