DocumentCode
3453157
Title
Extension of the Legendre polynomial approach for analyzing composite BAW resonators
Author
Raherison, A. ; Ratolojanahary, F.E. ; Lefebvre, J.E. ; Gryba, T. ; Ntagwirumugara, E.
Author_Institution
Univ. de Fianarantsoa, Fianarantsoa
fYear
2007
fDate
May 29 2007-June 1 2007
Firstpage
216
Lastpage
219
Abstract
We present a new ID resonator modeling through a polynomial approach. We have determined, for different values of the metallization thickness, the series and parallel resonance frequencies, the field profiles within the structure, and the effective electromechanical coupling coefficient and the Q-factor as well. To assess and validate the approach, the results are compared against other calculations from the literature.
Keywords
Legendre polynomials; Q-factor; acoustic resonators; bulk acoustic wave devices; metallisation; ID resonator modeling; Legendre polynomial approach; Q-factor; composite BAW resonators; effective electromechanical coupling coefficient; metallization thickness; Acoustic propagation; Acoustic waves; Convergence; Electrodes; Frequency; Harmonic analysis; Metallization; Polynomials; Q factor; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium, 2007 Joint with the 21st European Frequency and Time Forum. IEEE International
Conference_Location
Geneva
ISSN
1075-6787
Print_ISBN
978-1-4244-0646-3
Electronic_ISBN
1075-6787
Type
conf
DOI
10.1109/FREQ.2007.4319066
Filename
4319066
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