• DocumentCode
    3453315
  • Title

    Current dependency of sub-surface charging of insulators under electron beam irradiation

  • Author

    Matsumoto, Yoshifumi ; Kotera, Masatoshi

  • fYear
    2004
  • fDate
    Oct. 27-29, 2004
  • Firstpage
    116
  • Lastpage
    117
  • Keywords
    Conducting materials; Current density; Dielectric constant; Dielectric materials; Dielectrics and electrical insulation; Electron beams; Poisson equations; Shape; Surface charging; X-rays;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
  • Print_ISBN
    4-99024720-5
  • Type

    conf

  • DOI
    10.1109/IMNC.2004.245751
  • Filename
    1459501