DocumentCode
3453315
Title
Current dependency of sub-surface charging of insulators under electron beam irradiation
Author
Matsumoto, Yoshifumi ; Kotera, Masatoshi
fYear
2004
fDate
Oct. 27-29, 2004
Firstpage
116
Lastpage
117
Keywords
Conducting materials; Current density; Dielectric constant; Dielectric materials; Dielectrics and electrical insulation; Electron beams; Poisson equations; Shape; Surface charging; X-rays;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International
Print_ISBN
4-99024720-5
Type
conf
DOI
10.1109/IMNC.2004.245751
Filename
1459501
Link To Document