DocumentCode
3453383
Title
Trial fabrication of micron sized arm using reversible TiNi alloy thin film actuators
Author
Kuribayashi, Katsutoshi ; Shimizu, Seiji ; Nishinohara, Takayuki ; Taniguchi, Takao ; Yoshitake, Masahiro ; Ogawa, Sooichi
Author_Institution
Fac. of Eng., Yamaguchi Univ., Japan
Volume
3
fYear
1993
fDate
26-30 Jul 1993
Firstpage
1697
Abstract
A micron-sized arm which has large work space and uses reversible TiNi thin film is proposed. The transformation characteristics as analyzed by the DSC method shows that RTiNi can be controlled around 60°C. The design method and fabrication process for the arm are described, and the arm was fabricated on silicon wafer. It was shown that micron sized arm using three RTiNi thin films could be fabricated based on the trial fabrication of simple micron sized arm using a RTiNi thin film
Keywords
manipulators; Si; TiNi alloy thin film actuators; fabrication process; microactuators; micron-sized arm; silicon wafer; Actuators; Compressive stress; Fabrication; Nickel alloys; Robots; Shape memory alloys; Silicon; Temperature; Tensile stress; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Intelligent Robots and Systems '93, IROS '93. Proceedings of the 1993 IEEE/RSJ International Conference on
Conference_Location
Yokohama
Print_ISBN
0-7803-0823-9
Type
conf
DOI
10.1109/IROS.1993.583865
Filename
583865
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